Moody, M. J. (Creator), Henning, A. (Creator), Jurca, T. (Creator), Shang, J. Y. (Creator), Bergeron, H. (Creator), Balla, I. (Creator), Lding, J. N. (Contributor), Weiss, E. A. (Creator), Hersam, M. C. (Creator), Lohr, T. L. (Creator), Marks, T. J. (Creator), Lauhon, L. J. (Creator) (2018). Dataset for Atomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2. Materials Data Facility. 10.18126/m26351