Andrew Wayne Ott

  • 2540 Citations
19942018

Research output per year

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Research Output

  • 2540 Citations
  • 18 Article
  • 3 Conference article
  • 2 Conference contribution
  • 1 Comment/debate
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Conference contribution
1994

Atomic layer controlled deposition of Al2O3 films employing trimethylaluminum (TMA) and H2O vapor

Dillon, A. C., Ott, A. W., George, S. M. & Way, J. D., Jan 1 1994, Metal-Organic Chemical Vapor Deposition of Electronic Ceramics. Desu, S. B., Beach, D. B., Wessels, B. W. & Gokoglu, S. (eds.). Publ by Materials Research Society, p. 335-340 6 p. (Materials Research Society Symposium Proceedings; vol. 335).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Atomic layer growth of SiO 2 on Si(100) using the sequential deposition of SiCl 4 and H 2 O

Sneh, O., Wise, M. L., Okada, L. A., Ott, A. W. & George, S. M., Jan 1 1994, Gas-Phase and Surface Chemistry in Electronic Materials Processing. Publ by Materials Research Society, p. 25-30 6 p. (Materials Research Society Symposium Proceedings; vol. 334).

Research output: Chapter in Book/Report/Conference proceedingConference contribution