Elam, J. W., Biswas, M., Darling, S. B., Yanguas-Gil, A.,
Emery, J. D., Martinson, A. B. F., Nealey, P. F., Segal-Peretz, T., Peng, Q., Winterstein, J., Liddle, J. A. & Tseng, Y. C.,
2015,
Atomic Layer Deposition Applications 11. Roozeboom, F., De Gendt, S., Delabie, A., Elam, J. W., van der Straten, O. & Huffman, C. (eds.).
7 ed. Electrochemical Society Inc.,
p. 147-157 11 p. (ECS Transactions; vol. 69, no. 7).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution