Characterization and Metrology: High Spacial Resolution/High Precision Characterization of Doping, Defectivity and Work Function Utilizing Kelvin-Probe Force-Microscopy (KPFM) and Atom-Probe Tomography (APT)

Project: Research project

Project Details

StatusFinished
Effective start/end date7/1/06 → 12/31/09

Funding

  • Semiconductor Research Corporation (2006-VJ-1441)