Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 4/1/06 → 12/31/09 |
Funding
- Semiconductor Research Corporation (2006-OJ-1408)
Development of Scanning Near Field Ultrasound Holography (SNFUH) System as a Nano-Metrology Toolset for Buried Defects and Sub-Surface Pattern Recognition
- Dravid, Vinayak P (PD/PI)
- Shekhawat, Gajendra S (Co-PD/PI)
Project: Research project