NIRT: Science and Technology of Ultranocrystalline Diamond Films for Multifunctional MEMS/NEMS Devices

Project: Research project

Project Details

StatusFinished
Effective start/end date7/1/03 → 8/31/07

Funding

  • University of Missouri (C00002369/ CMS-00304472 (year 3) // C00002369/ CMS-00304472 (...)
  • National Science Foundation (C00002369/ CMS-00304472 (year 3) // C00002369/ CMS-00304472 (...)