Ptychography-based Rapid Imaging of Nano-Structures with Multi-layer Assemblies (PRISMA)

The Information Sciences Institute (ISI), an entity of the University of Southern California (USC), is submitting a proposal to IARPA’s Office of Safe and Secure Operations, BAA-15-12, Rapid Analysis of Various Emerging Nanoelectronics (RAVEN). As part of this submission, ISI is soliciting collaboration with the Northwestern University (NU), herein called subcontractor. The RAVEN program aims to develop a prototype analysis tool for acquiring images from all layers in a 1 cm2 chip area of a 14 nm integrated circuit (IC), within 25 days. The RAVEN program goals include: 1) Minimum 10 nm spatial resolution. 2) Nondestructive image acquisition using a single test sample; or 3) Destructive image acquisition using at most 5 test samples. 4) Twenty-five (25) days total to acquire the images from the sample(s) and create a 3D image representation of the entire chip. 5) Real-time checking during the acquisition process to eliminate the need for re-scans. RAVEN is anticipated to be a three-phase program over a 5-year period. Phase-1 will be of 2 years, Phase-2 of 2 years, and Phase-3 of 1 year. The resolution and acquisition speed performance will be initially demonstrated in a laboratory test bench. The program outcome is expected to be a fully automated prototype tool capable of rapid 3D image acquisition of individual chips. The acquisition speed requirements, computing, and graphical analysis capabilities are an important aspect of the tool development.