Scanning Probe Microscopy Characterization and Nanopatterning of Thin Films Grown by Atomic Layer Deposition

Hersam, Mark (PD/PI)

Materials Science and Engineering

Project: Research project

Status	Finished
Effective start/end date	12/1/07 → 8/31/12

Funding

UChicago Argonne, LLC, Argonne National Laboratory (8F-00661 // DE-AC02-06CH11357)
Department of Energy (8F-00661 // DE-AC02-06CH11357)