Surface Science of Atomic Layer Deposition

Project: Research project

Project Details

StatusFinished
Effective start/end date9/15/099/14/10

Funding

  • UChicago Argonne, LLC, Argonne National Laboratory (8J-00061 // DE-AC02-06CH11357)
  • Department of Energy (8J-00061 // DE-AC02-06CH11357)