3-D computational modeling of RF MEMS switches

H. D. Espinosa*, M. Fischer, Y. Zhu, S. Lee

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

17 Scopus citations

Abstract

Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new method that combines a Membrane Deflection Experiment (MDE) and numerical simulations. It is found that the thin aluminum alloy membranes used in the RF MEMS devices have a Young's modulus of 70±10 GPa in the plane of the membrane, and a residual tensile stress of 4±1 MPa. The accuracy of the identified parameters is confirmed by sensitivity studies to geometric aspects of the specimens and loads. It is found that changes in initial residual stress affect the load-deflection curves at small values of deflection. By contrast, variations in Young's modulus result in changes in load-deflection curvature at large displacements. These features are very important to decouple both effects in the process of identification of the parameters.

Original languageEnglish (US)
Title of host publication2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
EditorsM. Laudon, B. Romanowicz
Pages402-405
Number of pages4
StatePublished - Dec 1 2001
Event2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 - Hilton Head Island, SC, United States
Duration: Mar 19 2001Mar 21 2001

Publication series

Name2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Other

Other2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001
CountryUnited States
CityHilton Head Island, SC
Period3/19/013/21/01

Keywords

  • Computational Mechanics
  • Elasticity
  • Experimental Mechanics
  • MEMS
  • Radio Frequency

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of '3-D computational modeling of RF MEMS switches'. Together they form a unique fingerprint.

  • Cite this

    Espinosa, H. D., Fischer, M., Zhu, Y., & Lee, S. (2001). 3-D computational modeling of RF MEMS switches. In M. Laudon, & B. Romanowicz (Eds.), 2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001 (pp. 402-405). (2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001).