3-D computational modeling of RF MEMS switches

Engineering

• Young's Modulus 100%
• Microelectromechanical System 100%
• Membrane 50%
• Deflection 50%
• Aluminum Alloys 33%
• Computer Simulation 16%
• Load-Deflection Curve 16%
• Stress State 16%
• Experimental Technique 16%
• Sensitivity Analysis 16%
• Thin Membrane 16%
• Tensile Residual Stress 16%
• Experiments 16%
• Combines 16%
• Accuracy 16%
• Large Displacement 16%
• Small Value 16%

INIS

• membranes 66%
• young modulus 50%
• switches 33%
• computerized simulation 33%
• residual stresses 33%
• levels 16%
• devices 16%
• geometry 16%
• variations 16%
• values 16%
• curves 16%
• accuracy 16%
• sensitivity analysis 16%
• pressure range giga pa 16%
• aluminium alloys 16%
• pressure range mega pa 16%

Material Science

• Residual Stress 66%
• Membrane 50%
• Switch 33%
• Devices 16%