We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p-i-n photodiode array was hybridized to a 320×256 read-out integrated circuit entirely within our university research lab, and a working 320×256 camera was demonstrated. Several example solar-blind images from the camera are also provided.
|Original language||English (US)|
|Journal||Applied Physics Letters|
|State||Published - Jan 1 2005|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)