Abstract
We report AlGaN-based backilluminated solar-blind ultraviolet focal plane arrays operating at a wavelength of 280 nm. The electrical characteristics of the individual pixels are discussed, and the uniformity of the array is presented. The p-i-n photodiode array was hybridized to a 320×256 read-out integrated circuit entirely within our university research lab, and a working 320×256 camera was demonstrated. Several example solar-blind images from the camera are also provided.
Original language | English (US) |
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Article number | 011117 |
Journal | Applied Physics Letters |
Volume | 86 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1 2005 |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)