3D hierarchical architectures based on self-rolled-up silicon nitride membranes

INIS

• architecture 100%
• membranes 100%
• layers 66%
• thickness 66%
• silicon nitrides 66%
• processing 33%
• engineering 33%
• tubes 33%
• etching 33%
• control 33%
• anisotropy 33%
• compacts 33%
• heat treatments 33%
• carbon nanotubes 33%
• chirality 33%
• rolling 33%

Material Science

• Membrane 100%
• Silicon Nitride 66%
• Self Assembly 33%
• Chirality 33%
• Anisotropy 33%
• Electronic Component 33%
• Strained Silicon 33%
• Etching 33%
• Carbon Nanotubes 33%