TY - JOUR
T1 - 3D printed castle style Fabry-Perot microcavity on optical fiber tip as a highly sensitive humidity sensor
AU - Chen, Mao qing
AU - Zhao, Yong
AU - Wei, He ming
AU - Zhu, Cheng liang
AU - Krishnaswamy, Sridhar
N1 - Funding Information:
Yong Zhao received his M.A. and Ph.D. degrees, respectively, in precision instrument & automatic measurement with laser and fiber-optic techniques from the Harbin Institute of Technology, China, in 1998 and 2001. He was a postdoctoral fellow in the Department of Electronic Engineering of Tsinghua University from 2001 to 2003, and then worked as an associate professor in the Department of Automation, Tsinghua University of China. In 2009, he was awarded as the “Liaoning Bai-Qian-Wan Talents” by Liaoning Province. In 2014, he was awarded by the National Science Foundation for Distinguished Young Scholars of China. In 2015, he was honored as the Yangtze River Scholar Distinguished Professor by the Ministry of Education of China. Now he is working in Northeastern University as a full professor. As the academic leader and director of his research institute, his current research interests are the development of fiber-optic sensors and device, fiber Bragg grating sensors, novel sensor materials and principles, slow light and sensor technology, optical measurement technologies. He has authored and co-authored more than 260 scientific papers and conference presentations, 24 patents, and 5 books. He is a member in the Editorial Boards of the international journals of Sensor Letters, Instrumentation Science & Technology, Journal of Sensor Technology, and Advances in Optical Technologies.
Funding Information:
Mao-qing Chen was born in Liaoning, China, in Oct. 1992. He received the B.A. degrees in the College of Information Science and Engineering from the Shenyang University of Technology, China, in 2015, and the Ph.D. degree in detection technology and automatic equipment from Northeastern University, Shenyang, China, in 2020. From 2018 to 2019, he was a visiting student at CSSM supported by China Scholarship Council and Northwestern University, IL, USA. In 2020, he joined the State Key Laboratory for Integrated Automation of Process Industry, Northeastern University, China. His current research interests are optical fiber sensors, optical Fabry-Perot sensors, nanophotonics, and optoelectronic measurement technology and system.
Funding Information:
This work was supported in part by the National Natural Science Foundation of China under Grant 61425003 and 61773102 , Natural Science Foundation of Shanghai ( 20ZR1420300 ), the Fundamental Research Funds for the Central Universities under Grant N160408001 , N150401001 and part by the State Key Laboratory of Synthetical Automation for Process Industries under Grant 2013ZCX09 .
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2021/2/1
Y1 - 2021/2/1
N2 - A 3D printed castle style Fabry-Perot (FP) microcavity on optical fiber tip for humidity sensing is developed and demonstrated experimentally. The castle style FP microcavity, which has periodically arranged square holes on its side wall, is directly fabricated on an optical fiber tip through two-photon polymerization. Because of the existence of square holes in the castle style FP microcavity, Polyvinyl Alcohol (PVA) can be filled into the FP microcavity and a 360-degree humidity response sensitive area is formed. The contact area between water molecules and humidity sensitive materials is significantly increased, which will result in a high uniformity and a faster response of humidity sensing. Experimental results show that, the sensitivity of proposed castle style FP microcavity humidity sensor is up to 248.9 pm/%RH with relative humidity changing from 46 %RH to 75 %RH. In addition, repeated experiments indicate that the 3D printed castle style FP microcavity humidity sensors are repeatable and stable. Such excellent sensing performance with compact structure, highly sensitive, faster response and good stability makes the proposed sensing structure a highly promising candidate for humidity sensing applications.
AB - A 3D printed castle style Fabry-Perot (FP) microcavity on optical fiber tip for humidity sensing is developed and demonstrated experimentally. The castle style FP microcavity, which has periodically arranged square holes on its side wall, is directly fabricated on an optical fiber tip through two-photon polymerization. Because of the existence of square holes in the castle style FP microcavity, Polyvinyl Alcohol (PVA) can be filled into the FP microcavity and a 360-degree humidity response sensitive area is formed. The contact area between water molecules and humidity sensitive materials is significantly increased, which will result in a high uniformity and a faster response of humidity sensing. Experimental results show that, the sensitivity of proposed castle style FP microcavity humidity sensor is up to 248.9 pm/%RH with relative humidity changing from 46 %RH to 75 %RH. In addition, repeated experiments indicate that the 3D printed castle style FP microcavity humidity sensors are repeatable and stable. Such excellent sensing performance with compact structure, highly sensitive, faster response and good stability makes the proposed sensing structure a highly promising candidate for humidity sensing applications.
KW - 3D printing
KW - Castle style Fabry-Perot microcavity
KW - Fiber tip
KW - Optical fiber humidity sensor
KW - Polyvinyl alcohol
KW - Two-photon polymerization
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U2 - 10.1016/j.snb.2020.128981
DO - 10.1016/j.snb.2020.128981
M3 - Article
AN - SCOPUS:85093650510
SN - 0925-4005
VL - 328
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
M1 - 128981
ER -