3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling

Xin Ning, Heling Wang, Xinge Yu, Julio A.N.T. Soares, Zheng Yan, Kewang Nan, Gabriel Velarde, Yeguang Xue, Rujie Sun, Qiyi Dong, Haiwen Luan, Chan Mi Lee, Aditya Chempakasseril, Mengdi Han, Yiqi Wang, Luming Li, Yonggang Huang, Yihui Zhang, John A. Rogers

Research output: Research - peer-reviewArticle

  • 1 Citations

Abstract

Microelectromechanical systems remain an area of significant interest in fundamental and applied research due to their wide ranging applications. Most device designs, however, are largely 2D and constrained to only a few simple geometries. Achieving tunable resonant frequencies or broad operational bandwidths requires complex components and/or fabrication processes. The work presented here reports unusual classes of 3D micromechanical systems in the form of vibratory platforms assembled by controlled compressive buckling. Such 3D structures can be fabricated across a broad range of length scales and from various materials, including soft polymers, monocrystalline silicon, and their composites, resulting in a wide scope of achievable resonant frequencies and mechanical behaviors. Platforms designed with multistable mechanical responses and vibrationally decoupled constituent elements offer improved bandwidth and frequency tunability. Furthermore, the resonant frequencies can be controlled through deformations of an underlying elastomeric substrate. Systematic experimental and computational studies include structures with diverse geometries, ranging from tables, cages, rings, ring-crosses, ring-disks, two-floor ribbons, flowers, umbrellas, triple-cantilever platforms, and asymmetric circular helices, to multilayer constructions. These ideas form the foundations for engineering designs that complement those supported by conventional, micro-electromechanical systems, with capabilities that could be useful in systems for biosensing, energy harvesting, and others.

LanguageEnglish (US)
Article number1605914
JournalAdvanced Functional Materials
Volume27
Issue number14
DOIs
StatePublished - Apr 11 2017

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buckling
resonant frequencies
platforms
rings
Buckling
Natural frequencies
microelectromechanical systems
bandwidth
geometry
MEMS
Bandwidth
Geometry
silicon polymers
complement
helices
ribbons
engineering
fabrication
composite materials
energy

Keywords

  • 3D microstructures
  • compressive buckling
  • micro-electromechanical systems
  • vibrational modes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Condensed Matter Physics
  • Electrochemistry

Cite this

3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling. / Ning, Xin; Wang, Heling; Yu, Xinge; Soares, Julio A.N.T.; Yan, Zheng; Nan, Kewang; Velarde, Gabriel; Xue, Yeguang; Sun, Rujie; Dong, Qiyi; Luan, Haiwen; Lee, Chan Mi; Chempakasseril, Aditya; Han, Mengdi; Wang, Yiqi; Li, Luming; Huang, Yonggang; Zhang, Yihui; Rogers, John A.

In: Advanced Functional Materials, Vol. 27, No. 14, 1605914, 11.04.2017.

Research output: Research - peer-reviewArticle

Ning, X, Wang, H, Yu, X, Soares, JANT, Yan, Z, Nan, K, Velarde, G, Xue, Y, Sun, R, Dong, Q, Luan, H, Lee, CM, Chempakasseril, A, Han, M, Wang, Y, Li, L, Huang, Y, Zhang, Y & Rogers, JA 2017, '3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling' Advanced Functional Materials, vol 27, no. 14, 1605914. DOI: 10.1002/adfm.201605914
Ning X, Wang H, Yu X, Soares JANT, Yan Z, Nan K et al. 3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling. Advanced Functional Materials. 2017 Apr 11;27(14). 1605914. Available from, DOI: 10.1002/adfm.201605914
Ning, Xin ; Wang, Heling ; Yu, Xinge ; Soares, Julio A.N.T. ; Yan, Zheng ; Nan, Kewang ; Velarde, Gabriel ; Xue, Yeguang ; Sun, Rujie ; Dong, Qiyi ; Luan, Haiwen ; Lee, Chan Mi ; Chempakasseril, Aditya ; Han, Mengdi ; Wang, Yiqi ; Li, Luming ; Huang, Yonggang ; Zhang, Yihui ; Rogers, John A./ 3D Tunable, Multiscale, and Multistable Vibrational Micro-Platforms Assembled by Compressive Buckling. In: Advanced Functional Materials. 2017 ; Vol. 27, No. 14.
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