8. A specimen-exchange device for an ultra-high vacuum atom-probe field-ion microscope

Alfred Wagner*, Thomas M. Hall, David N. Seidman

*Corresponding author for this work

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A specimen-exchange device is described for an ultra-high vacuum field-ion microscope (FIM). This device completely eliminates the long pump-down period that is required if the FIM chamber is brought back to atmospheric pressure. The pressure in an air-lock is reduced to 10-6 torr before the exchange takes place and the pressure in the FIM chamber remains below 10-7 torr during the exchange and it drops to less than 3 × 10-9 torr within 15 min after the exchange.

Original languageEnglish (US)
Pages (from-to)543-545
Number of pages3
JournalVacuum
Volume28
Issue number12
DOIs
StatePublished - Dec 1978

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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