A comparison of mechanical properties of three MEMS materials - Silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon (Ta-C)

Horacio Dante Espinosa*, B. Peng, N. Moldovan, T. A. Friedmann, X. Xiao, D. C. Mancini, O. Auciello, J. Carlisle, C. A. Zorman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

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Engineering & Materials Science

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