A comparison of X-ray microdiffraction and coherent gradient sensing in measuring discontinuous curvatures in thin film

Substrate systems

Michal A. Brown*, Tae Soon Park, Ares Rosakis, Ersan Ustundag, Young Huang, Nobumichi Tamura, Bryan Valek

*Corresponding author for this work

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

The coherent gradient sensor (CGS) is a shearing interferometer which has been proposed for the rapid, full-field measurement of deformation states (slopes and curvatures) in thin film-wafer substrate systems, and for the subsequent inference of stresses in the thin films. This approach needs to be verified using a more well-established but time-consuming grain orientation and stress measurement tool. X-ray microdiffraction (XRD). Both CGS and XRD are used to measure the deformation state of the same W film/Si wafer at room temperature. CGS provides a global, wafer-level measurement of slopes while XRD provides a local micromeasurement of lattice rotations. An extreme case of a circular Si wafer with a circular W film island in its center is used because of the presence of discontinuous system curvatures across the wafer. The results are also compared with a theoretical model based on elastic plate analysis of the axisymmetric biomaterial film-substrate system. Slope and curvature measurements by XRD and by CGS compare very well with each other and with theory. The favorable comparison demonstrates that wafer-level CGS metrology provides a quick and accurate alternative to other measurements. It also demonstrates the accuracy of plate theory in modeling thin film-substrate systems, even in the presence of curvature discontinuities.

Original languageEnglish (US)
Pages (from-to)723-729
Number of pages7
JournalJournal of Applied Mechanics, Transactions ASME
Volume73
Issue number5
DOIs
StatePublished - Sep 1 2006

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curvature
wafers
X rays
Thin films
gradients
Sensors
Substrates
thin films
sensors
x rays
slopes
Level measurement
Stress measurement
plate theory
elastic plates
Shearing
Biomaterials
stress measurement
Interferometers
shearing

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Brown, Michal A. ; Park, Tae Soon ; Rosakis, Ares ; Ustundag, Ersan ; Huang, Young ; Tamura, Nobumichi ; Valek, Bryan. / A comparison of X-ray microdiffraction and coherent gradient sensing in measuring discontinuous curvatures in thin film : Substrate systems. In: Journal of Applied Mechanics, Transactions ASME. 2006 ; Vol. 73, No. 5. pp. 723-729.
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A comparison of X-ray microdiffraction and coherent gradient sensing in measuring discontinuous curvatures in thin film : Substrate systems. / Brown, Michal A.; Park, Tae Soon; Rosakis, Ares; Ustundag, Ersan; Huang, Young; Tamura, Nobumichi; Valek, Bryan.

In: Journal of Applied Mechanics, Transactions ASME, Vol. 73, No. 5, 01.09.2006, p. 723-729.

Research output: Contribution to journalArticle

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