A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Jun Amano*, David N. Seidman

*Corresponding author for this work

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.

Original languageEnglish (US)
Pages (from-to)1125-1129
Number of pages5
JournalReview of Scientific Instruments
Volume50
Issue number9
DOIs
StatePublished - Dec 1 1979

Fingerprint

Ion microscopes
ion microscopes
Ultrahigh vacuum
Ion beams
ultrahigh vacuum
Ion sources
ion beams
ion sources
analyzers
Atoms
probes
helium ions
chambers
Ion bombardment
ion irradiation
Helium
atoms
Irradiation
irradiation
energy

ASJC Scopus subject areas

  • Instrumentation

Cite this

@article{6ae53c58ef444e7ab68bf8fc5c1491bc,
title = "A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope",
abstract = "An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.",
author = "Jun Amano and Seidman, {David N.}",
year = "1979",
month = "12",
day = "1",
doi = "10.1063/1.1135998",
language = "English (US)",
volume = "50",
pages = "1125--1129",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "9",

}

A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope. / Amano, Jun; Seidman, David N.

In: Review of Scientific Instruments, Vol. 50, No. 9, 01.12.1979, p. 1125-1129.

Research output: Contribution to journalArticle

TY - JOUR

T1 - A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

AU - Amano, Jun

AU - Seidman, David N.

PY - 1979/12/1

Y1 - 1979/12/1

N2 - An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.

AB - An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.

UR - http://www.scopus.com/inward/record.url?scp=0018517856&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0018517856&partnerID=8YFLogxK

U2 - 10.1063/1.1135998

DO - 10.1063/1.1135998

M3 - Article

VL - 50

SP - 1125

EP - 1129

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 9

ER -