A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Jun Amano; David N. Seidman

doi:10.1063/1.1135998

A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Jun Amano^*, David N. Seidman

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10^-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm^-2 for 300-eV He⁺ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10^-7 to ≈3×10^-10 Torr in the atom-probe FIM chamber was 0.5 h.

Original language	English (US)
Pages (from-to)	1125-1129
Number of pages	5
Journal	Review of Scientific Instruments
Volume	50
Issue number	9
DOIs	https://doi.org/10.1063/1.1135998
State	Published - 1979

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Instrumentation

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title = "A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope",

abstract = "An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.",

author = "Jun Amano and Seidman, {David N.}",

year = "1979",

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T1 - A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

AU - Amano, Jun

AU - Seidman, David N.

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N2 - An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.

AB - An ultrahigh-vacuum (UHV) differentially pumped low-energy (50-3000 eV) ion beam system for the in situ irradiation of specimens in a UHV atom-probe field-ion microscope (FIM) was designed and constructed. The ion beam system consisted of a Finkelstein-type ion source, an Einzel lens, and a magnetic mass analyzer. The ion source was connected to the analyzer chamber by small apertures which resulted in differential pumping between the ion source and the analyzer chamber; during a typical in situ irradiation of a specimen in the atom-probe FIM the total pressure was maintained at ≈10-7 Torr. In the case of helium ion irradiation the optimum ion-current density was ≈0.5 μA cm-2 for 300-eV He+ ions at the atom-probe FIM specimen. After the completion of a helium ion irradiation the pumpdown time from 5×10-7 to ≈3×10-10 Torr in the atom-probe FIM chamber was 0.5 h.

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A differentially pumped low-energy ion beam system for an ultrahigh-vacuum atom-probe field-ion microscope

Abstract

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