A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau*, V. Crecea, C. P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T. C. Chiang, I. K. Robinson

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Original languageEnglish (US)
Title of host publicationDevelopments in X-Ray Tomography V
DOIs
StatePublished - 2006
EventDevelopments in X-Ray Tomography V - San Diego, CA, United States
Duration: Aug 15 2006Aug 17 2006

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume6318
ISSN (Print)1605-7422

Other

OtherDevelopments in X-Ray Tomography V
CountryUnited States
CitySan Diego, CA
Period8/15/068/17/06

Keywords

  • Fresnel zone plate
  • Full-field microscopy
  • Hard x-rays
  • Kirkpatrick-baez mirror
  • Tomography

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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