A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau; V. Crecea; C. P. Richter; K. M. Peterson; P. R. Jemian; U. Neuhäusler; G. Schneider; X. Yu; P. V. Braun; T. C. Chiang; I. K. Robinson

doi:10.1117/12.680975

A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

C. Rau^*, V. Crecea, C. P. Richter, K. M. Peterson, P. R. Jemian, U. Neuhäusler, G. Schneider, X. Yu, P. V. Braun, T. C. Chiang, I. K. Robinson

^*Corresponding author for this work

Otolaryngology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

12 Scopus citations

Abstract

An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

Original language	English (US)
Title of host publication	Developments in X-Ray Tomography V
DOIs	https://doi.org/10.1117/12.680975
State	Published - 2006
Event	Developments in X-Ray Tomography V - San Diego, CA, United States Duration: Aug 15 2006 → Aug 17 2006

Publication series

Name	Progress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume	6318
ISSN (Print)	1605-7422

Other

Other	Developments in X-Ray Tomography V
Country/Territory	United States
City	San Diego, CA
Period	8/15/06 → 8/17/06

Keywords

Fresnel zone plate
Full-field microscopy
Hard x-rays
Kirkpatrick-baez mirror
Tomography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Atomic and Molecular Physics, and Optics
Radiology Nuclear Medicine and imaging

Access to Document

10.1117/12.680975

Cite this

Rau, C., Crecea, V., Richter, C. P., Peterson, K. M., Jemian, P. R., Neuhäusler, U., Schneider, G., Yu, X., Braun, P. V., Chiang, T. C., & Robinson, I. K. (2006). A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution. In Developments in X-Ray Tomography V [63181G] (Progress in Biomedical Optics and Imaging - Proceedings of SPIE; Vol. 6318). https://doi.org/10.1117/12.680975

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abstract = "An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.",

keywords = "Fresnel zone plate, Full-field microscopy, Hard x-rays, Kirkpatrick-baez mirror, Tomography",

author = "C. Rau and V. Crecea and Richter, {C. P.} and Peterson, {K. M.} and Jemian, {P. R.} and U. Neuh{\"a}usler and G. Schneider and X. Yu and Braun, {P. V.} and Chiang, {T. C.} and Robinson, {I. K.}",

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Rau, C, Crecea, V, Richter, CP, Peterson, KM, Jemian, PR, Neuhäusler, U, Schneider, G, Yu, X, Braun, PV, Chiang, TC & Robinson, IK 2006, A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution. in Developments in X-Ray Tomography V., 63181G, Progress in Biomedical Optics and Imaging - Proceedings of SPIE, vol. 6318, Developments in X-Ray Tomography V, San Diego, CA, United States, 8/15/06. https://doi.org/10.1117/12.680975

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AU - Rau, C.

AU - Crecea, V.

AU - Richter, C. P.

AU - Peterson, K. M.

AU - Jemian, P. R.

AU - Neuhäusler, U.

AU - Schneider, G.

AU - Yu, X.

AU - Braun, P. V.

AU - Chiang, T. C.

AU - Robinson, I. K.

PY - 2006

Y1 - 2006

N2 - An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

AB - An instrument for high-resolution imaging and tomography has been built at the APS beamline 34 ID-C, Argonne National Laboratory. In-line phase contrast tomography can be performed with micrometer resolution. For imaging and tomography with resolution better than 100nm a hard X-ray microscope has been integrated to the instrument. It works with a Kirkpatrick-Baez (KB) mirror as condenser and a Fresnel-Zone plate (FZP) as an objective lens. 50 nm-features have been resolved in a Nickel structure operating the microscope at a photon energy of 9keV. Phase objects with negligible absorption contrast have been imaged. Tomography scans were performed on photonic crystals.

KW - Fresnel zone plate

KW - Full-field microscopy

KW - Hard x-rays

KW - Kirkpatrick-baez mirror

KW - Tomography

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T2 - Developments in X-Ray Tomography V

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ER -

A hard X-ray KB-FZP microscope for tomography with Sub-100-nm resolution

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