A membrane deflection fracture experiment to investigate fracture toughness of freestanding MEMS materials

Research output: Contribution to journalConference article

Abstract

This paper presents a novel Membrane Deflection Fracture Experiment (MDFE) to investigate the fracture toughness of MEMS and other advanced materials in thin film form. It involves the stretching of freestanding thin-film membranes, in a fixed-fixed configuration, containing pre-existing cracks. The fracture behavior of ultrananocrystalline diamond (UNCD), a material developed at Argonne National Laboratory, is investigated to illustrate the methodology. When the fracture initiates from sharp cracks, produced by indentation, the fracture toughness was found to be 4.7 MPa m1/2. When the fracture initiates from blunt notches with radii about 100 nm, machined by focused ion beam (FIB), the mean value of the apparent fracture toughness was found to be 7.2 MPa m 1/2. Comparison of these two values, using the model proposed by Drory et al. [9], provides a correction factor of 2/3, which corresponds to a mean value of p/2x=1/2.

Original languageEnglish (US)
Pages (from-to)159-165
Number of pages7
JournalMaterials Research Society Symposium - Proceedings
Volume795
StatePublished - Dec 1 2003
EventThin Films - Stresses and Mechanical Properties X - Boston, MA., United States
Duration: Dec 1 2003Dec 5 2003

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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