A method for precision patterning of silicone elastomer and its applications

Kee Suk Ryu*, Xuefeng Wang, Kashan Shaikh, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

64 Scopus citations

Abstract

This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets.

Original languageEnglish (US)
Pages (from-to)568-575
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume13
Issue number4
DOIs
StatePublished - Aug 2004

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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