A microfluidic method for sensor fabrication on curved surfaces

Edgar D. Goluch; Kashan A. Shaikh; Kee Ryu; Jack Chen; Jonathan M. Engel; Chang Liu

A microfluidic method for sensor fabrication on curved surfaces

Edgar D. Goluch^*, Kashan A. Shaikh, Kee Ryu, Jack Chen, Jonathan M. Engel, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

The microfluidic technique employed for the fabrication of metal resistors that are subsequently utilized as temperature sensors and fluid flow sensors is discussed. The method allows deposition of precision thin film metal patterns on large objects. The two steps of the technique are creation of polydimethylsiloxane (PDMS) microchannels and sealing of PDMS piece against the surface of interest to form enclosed microfluidic channels. The technique is applicable to the patterning of silver and gold on various substrates.

Original language	English (US)
Title of host publication	2004 AIChE Annual Meeting, Conference Proceedings
Pages	9673-9674
Number of pages	2
State	Published - Dec 1 2004
Event	2004 AIChE Annual Meeting - Austin, TX, United States Duration: Nov 7 2004 → Nov 12 2004

Other

Other	2004 AIChE Annual Meeting
Country/Territory	United States
City	Austin, TX
Period	11/7/04 → 11/12/04

ASJC Scopus subject areas

General Engineering

Cite this

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title = "A microfluidic method for sensor fabrication on curved surfaces",

abstract = "The microfluidic technique employed for the fabrication of metal resistors that are subsequently utilized as temperature sensors and fluid flow sensors is discussed. The method allows deposition of precision thin film metal patterns on large objects. The two steps of the technique are creation of polydimethylsiloxane (PDMS) microchannels and sealing of PDMS piece against the surface of interest to form enclosed microfluidic channels. The technique is applicable to the patterning of silver and gold on various substrates.",

author = "Goluch, {Edgar D.} and Shaikh, {Kashan A.} and Kee Ryu and Jack Chen and Engel, {Jonathan M.} and Chang Liu",

year = "2004",

month = dec,

day = "1",

language = "English (US)",

pages = "9673--9674",

booktitle = "2004 AIChE Annual Meeting, Conference Proceedings",

note = "2004 AIChE Annual Meeting ; Conference date: 07-11-2004 Through 12-11-2004",

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TY - GEN

T1 - A microfluidic method for sensor fabrication on curved surfaces

AU - Goluch, Edgar D.

AU - Shaikh, Kashan A.

AU - Ryu, Kee

AU - Chen, Jack

AU - Engel, Jonathan M.

AU - Liu, Chang

PY - 2004/12/1

Y1 - 2004/12/1

N2 - The microfluidic technique employed for the fabrication of metal resistors that are subsequently utilized as temperature sensors and fluid flow sensors is discussed. The method allows deposition of precision thin film metal patterns on large objects. The two steps of the technique are creation of polydimethylsiloxane (PDMS) microchannels and sealing of PDMS piece against the surface of interest to form enclosed microfluidic channels. The technique is applicable to the patterning of silver and gold on various substrates.

AB - The microfluidic technique employed for the fabrication of metal resistors that are subsequently utilized as temperature sensors and fluid flow sensors is discussed. The method allows deposition of precision thin film metal patterns on large objects. The two steps of the technique are creation of polydimethylsiloxane (PDMS) microchannels and sealing of PDMS piece against the surface of interest to form enclosed microfluidic channels. The technique is applicable to the patterning of silver and gold on various substrates.

UR - http://www.scopus.com/inward/record.url?scp=22544460552&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=22544460552&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:22544460552

SP - 9673

EP - 9674

BT - 2004 AIChE Annual Meeting, Conference Proceedings

T2 - 2004 AIChE Annual Meeting

Y2 - 7 November 2004 through 12 November 2004

ER -

A microfluidic method for sensor fabrication on curved surfaces

Abstract

Other

ASJC Scopus subject areas

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