A micromachined flow shear-stress sensor based on thermal transfer principles

Chang Liu; Jin Biao Huang; Zhenjun Zhu; Fukang Jiang; Steve Tung; Yu Chong Tai; Chih Ming Ho

doi:10.1109/84.749408

A micromachined flow shear-stress sensor based on thermal transfer principles

Chang Liu^*, Jin Biao Huang, Zhenjun Zhu, Fukang Jiang, Steve Tung, Yu Chong Tai, Chih Ming Ho

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

190 Scopus citations

Abstract

Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of polycrystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind tunnel under three operation modes - constant current, constant voltage, and constant temperature. Under the constant-temperature mode, a typical shear-stress sensor exhibits a time constant of 72 μs.

Original language	English (US)
Pages (from-to)	90-98
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	8
Issue number	1
DOIs	https://doi.org/10.1109/84.749408
State	Published - Mar 1999

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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abstract = "Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of polycrystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind tunnel under three operation modes - constant current, constant voltage, and constant temperature. Under the constant-temperature mode, a typical shear-stress sensor exhibits a time constant of 72 μs.",

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AU - Huang, Jin Biao

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AU - Jiang, Fukang

AU - Tung, Steve

AU - Tai, Yu Chong

AU - Ho, Chih Ming

PY - 1999/3

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N2 - Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of polycrystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind tunnel under three operation modes - constant current, constant voltage, and constant temperature. Under the constant-temperature mode, a typical shear-stress sensor exhibits a time constant of 72 μs.

AB - Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of polycrystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate and therefore increases the sensitivity of the sensor. Testing of the sensor has been conducted in a wind tunnel under three operation modes - constant current, constant voltage, and constant temperature. Under the constant-temperature mode, a typical shear-stress sensor exhibits a time constant of 72 μs.

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A micromachined flow shear-stress sensor based on thermal transfer principles

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