A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

Jack Chen*, Jonathan Engel, Nannan Chen, Chang Liu

*Corresponding author for this work

Research output: Contribution to journalConference article

7 Scopus citations

Abstract

We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.

Original languageEnglish (US)
Article numberTPa14
Pages (from-to)299-302
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
StatePublished - Oct 25 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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