A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

Jack Chen; Jonathan Engel; Nannan Chen; Chang Liu

A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

Jack Chen^*, Jonathan Engel, Nannan Chen, Chang Liu

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.

Original language	English (US)
Article number	TPa14
Pages (from-to)	299-302
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
State	Published - Oct 25 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: Jan 30 2005 → Feb 3 2005

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

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title = "A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging",

abstract = "We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.",

author = "Jack Chen and Jonathan Engel and Nannan Chen and Chang Liu",

year = "2005",

month = oct,

day = "25",

language = "English (US)",

pages = "299--302",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

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T1 - A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

AU - Chen, Jack

AU - Engel, Jonathan

AU - Chen, Nannan

AU - Liu, Chang

PY - 2005/10/25

Y1 - 2005/10/25

N2 - We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.

AB - We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.

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M3 - Conference article

AN - SCOPUS:26844479210

SN - 1084-6999

SP - 299

EP - 302

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - TPa14

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

Abstract

ASJC Scopus subject areas

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