Abstract
After the successful design and fabrication of a single-probe nanofountain pen, a second-generation device with two on-chip ink reservoirs feeding a linear array of 12 microfluidic cantilever probes was manufactured. The new device excels by sharper and more uniform tips, more robust fabrication and improved performance in writing and imaging. Its capabilities in writing sub-100 nm features and with two different inks delivered in liquid phase were demonstrated. Their applications range from an affordable method of nanopatterning with sub-100 nm resolution to microspotters for bio-assay generation and tools for combinatorial nanoscale biochemical experiments.
Original language | English (US) |
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Article number | 004 |
Pages (from-to) | 1935-1942 |
Number of pages | 8 |
Journal | Journal of Micromechanics and Microengineering |
Volume | 16 |
Issue number | 10 |
DOIs | |
State | Published - Oct 1 2006 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering