A novel AFM chip for fountain pen nanolithography - Design and microfabrication

Keun Ho Kim*, Nicolaie Moldovan, Changhong Ke, Horacio D. Espinosa

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

6 Scopus citations


A novel atomic force microscopy (AFM) probe has been developed to expand the capability and applications of dip-pen nanolithography (DPN) technology. This new probe has integrated microchannels and reservoirs for continuous ink feed, which allow "fountain-pen" writing called "Fountain Pen Nanolithography" (FPN). Ink is transported from the reservoirs through the microchannels and eventually dispensed onto substrates via a volcano-like dispensing tip. Numerical simulations have been performed to select optimal materials and suitable tip shapes providing a stable fluid-air interface in the tip. MicroChannel and dispensing tip have been fabricated by surface micromachining, in particular employing 3 layers of thin films. Fluid flow through the microchannels has been experimentally examined. The probe was used to write on a gold substrate.

Original languageEnglish (US)
Pages (from-to)267-272
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2003
EventMicro- and Nanosystems - Boston, MA, United States
Duration: Dec 1 2003Dec 3 2003

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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