A novel MEMS-based nanoscale material testing system

Horacio D. Espinosa*, Yong Zhu, Alberto Corigliano

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper describes the design and operation of a novel MEMS-based material testing system used for insitu tensile testing of nanostructures, The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with sub-nanometer displacement accuracy, while simultaneously measuring the applied load electronically with nano-Newton resolution. The device performance was demonstrated by testing palladium nanowires.

Original languageEnglish (US)
Title of host publication7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
DOIs
StatePublished - Dec 1 2006
Event7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006 - Como, Italy
Duration: Apr 24 2006Apr 26 2006

Publication series

Name7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
Volume2006

Other

Other7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
CountryItaly
CityComo
Period4/24/064/26/06

ASJC Scopus subject areas

  • Engineering(all)

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