A novel MEMS-based nanoscale material testing system

Horacio D. Espinosa; Yong Zhu; Alberto Corigliano

doi:10.1109/ESIME.2006.1644064

A novel MEMS-based nanoscale material testing system

Horacio D. Espinosa^*, Yong Zhu, Alberto Corigliano

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This paper describes the design and operation of a novel MEMS-based material testing system used for insitu tensile testing of nanostructures, The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with sub-nanometer displacement accuracy, while simultaneously measuring the applied load electronically with nano-Newton resolution. The device performance was demonstrated by testing palladium nanowires.

Original language	English (US)
Title of host publication	7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
DOIs	https://doi.org/10.1109/ESIME.2006.1644064
State	Published - Dec 1 2006
Event	7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006 - Como, Italy Duration: Apr 24 2006 → Apr 26 2006

Publication series

Name	7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
Volume	2006

Other

Other	7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006
Country	Italy
City	Como
Period	4/24/06 → 4/26/06

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/ESIME.2006.1644064

Fingerprint Dive into the research topics of 'A novel MEMS-based nanoscale material testing system'. Together they form a unique fingerprint.

Cite this

Espinosa, H. D., Zhu, Y., & Corigliano, A. (2006). A novel MEMS-based nanoscale material testing system. In 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006 [1644064] (7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006; Vol. 2006). https://doi.org/10.1109/ESIME.2006.1644064

Espinosa, Horacio D. ; Zhu, Yong ; Corigliano, Alberto. / A novel MEMS-based nanoscale material testing system. 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006. 2006. (7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006).

@inproceedings{e7ff79e5f8594b09b927a560de4ed3bc,

title = "A novel MEMS-based nanoscale material testing system",

abstract = "This paper describes the design and operation of a novel MEMS-based material testing system used for insitu tensile testing of nanostructures, The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with sub-nanometer displacement accuracy, while simultaneously measuring the applied load electronically with nano-Newton resolution. The device performance was demonstrated by testing palladium nanowires.",

author = "Espinosa, {Horacio D.} and Yong Zhu and Alberto Corigliano",

year = "2006",

month = dec,

day = "1",

doi = "10.1109/ESIME.2006.1644064",

language = "English (US)",

isbn = "1424402751",

series = "7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006",

booktitle = "7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006",

note = "7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006 ; Conference date: 24-04-2006 Through 26-04-2006",

}

Espinosa, HD, Zhu, Y & Corigliano, A 2006, A novel MEMS-based nanoscale material testing system. in 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006., 1644064, 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006, vol. 2006, 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006, Como, Italy, 4/24/06. https://doi.org/10.1109/ESIME.2006.1644064

A novel MEMS-based nanoscale material testing system. / Espinosa, Horacio D.; Zhu, Yong; Corigliano, Alberto.

7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006. 2006. 1644064 (7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - A novel MEMS-based nanoscale material testing system

AU - Espinosa, Horacio D.

AU - Zhu, Yong

AU - Corigliano, Alberto

PY - 2006/12/1

Y1 - 2006/12/1

N2 - This paper describes the design and operation of a novel MEMS-based material testing system used for insitu tensile testing of nanostructures, The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with sub-nanometer displacement accuracy, while simultaneously measuring the applied load electronically with nano-Newton resolution. The device performance was demonstrated by testing palladium nanowires.

AB - This paper describes the design and operation of a novel MEMS-based material testing system used for insitu tensile testing of nanostructures, The device consists of a thermal actuator and a capacitive load sensor with a specimen in between. The best load sensor resolutions were achieved reaching 0.05 fF in capacitance, 1 nm in displacement and 12 nN in load. For the first time, this MEMS-based material testing scheme offers the possibility of continuous observation of the specimen deformation and fracture with sub-nanometer displacement accuracy, while simultaneously measuring the applied load electronically with nano-Newton resolution. The device performance was demonstrated by testing palladium nanowires.

UR - http://www.scopus.com/inward/record.url?scp=33847091280&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847091280&partnerID=8YFLogxK

U2 - 10.1109/ESIME.2006.1644064

DO - 10.1109/ESIME.2006.1644064

M3 - Conference contribution

AN - SCOPUS:33847091280

SN - 1424402751

SN - 9781424402755

T3 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006

BT - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006

T2 - 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006

Y2 - 24 April 2006 through 26 April 2006

ER -

Espinosa HD, Zhu Y, Corigliano A. A novel MEMS-based nanoscale material testing system. In 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006. 2006. 1644064. (7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, EuroSimE 2006). https://doi.org/10.1109/ESIME.2006.1644064