Abstract
A novel micromachining process for embedding ferromagnetic materials within a thin, spin-casted polydimethyl siloxane (PDMS) membrane was developed. Unique pump and diffuser mechanisms that allow for continuous pumping were also developed. Experimentally, successful on-chip fluid pumping was successfully demonstrated.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2394-2397 |
| Number of pages | 4 |
| Journal | Annual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings |
| Volume | 3 |
| State | Published - 2000 |
| Event | 22nd Annual International Conference of the IEEE Engineering in Medicine and Biology Society - Chicago, IL, United States Duration: Jul 23 2000 → Jul 28 2000 |
Keywords
- Magnetic actuation
- Membrane
- Microfluidic system
- Micropump
- Silicone elastomer
ASJC Scopus subject areas
- Signal Processing
- Health Informatics
- Computer Vision and Pattern Recognition
- Biomedical Engineering