A novel micromachined magnetic membrane microfluid pump

M. Khoo*, C. Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

42 Scopus citations


A novel micromachining process for embedding ferromagnetic materials within a thin, spin-casted polydimethyl siloxane (PDMS) membrane was developed. Unique pump and diffuser mechanisms that allow for continuous pumping were also developed. Experimentally, successful on-chip fluid pumping was successfully demonstrated.

Original languageEnglish (US)
Pages (from-to)2394-2397
Number of pages4
JournalAnnual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings
StatePublished - Dec 1 2000


  • Magnetic actuation
  • Membrane
  • Microfluidic system
  • Micropump
  • Silicone elastomer

ASJC Scopus subject areas

  • Bioengineering

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