A novel opto-electro-mechanical photon sensor

H. Mohseni*, J. Kohoutek, O. G. Memis

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


We present theoretical and experimental results for a novel photon detector based on a strong opto-electro-mechanical effect. In this new architecture, photo-generated carriers are compresses under a suspended nano-injector to produce significant electrostatic pressure. The pressure results in a reduced gap between the nano-injector and the semiconductor, which in turn increases the tunnel based electron injection dramatically. Our experimental results show very good sensitivity at 1.55 μm at room temperature. We also show that Casimir force has a considerable effect on the device performance, due to the small gap between nano-injector and semiconductor.

Original languageEnglish (US)
Article number72220S
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2009
EventQuantum Sensing and Nanophotonic Devices VI - San Jose, CA, United States
Duration: Jan 25 2009Jan 28 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Applied Mathematics
  • Electrical and Electronic Engineering
  • Computer Science Applications


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