Abstract
This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.
| Original language | English (US) |
|---|---|
| Article number | 105006 |
| Journal | Review of Scientific Instruments |
| Volume | 87 |
| Issue number | 10 |
| DOIs | |
| State | Published - Oct 1 2016 |
Funding
This work was supported by the National Natural Science Foundation of China (Grant Nos. 51425504 and 51575488), Science Fund for Creative Research Groups of National Natural Science Foundation of China Nos. 51521064, Zhejiang Provincial Natural Science Foundation of China No. LZ13E050001, and China Scholarship Council (No. 201406320148)
ASJC Scopus subject areas
- Instrumentation