A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification

Wu Le Zhu; Zhiwei Zhu; Yi Shi; Xiangfan Chen; Yu He; Kornel Ehmann; Bing Feng Ju

doi:10.1063/1.4965880

A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification

Wu Le Zhu, Zhiwei Zhu^*, Yi Shi, Xiangfan Chen, Yu He, Kornel Ehmann, Bing Feng Ju

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.

Original language	English (US)
Article number	105006
Journal	Review of Scientific Instruments
Volume	87
Issue number	10
DOIs	https://doi.org/10.1063/1.4965880
State	Published - Oct 1 2016

ASJC Scopus subject areas

Instrumentation

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@article{9463391a26b4466bb10b0554e672a1c3,

title = "A novel piezoelectrically actuated 2-DoF compliant micro/nano-positioning stage with multi-level amplification",

abstract = "This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.",

author = "Zhu, {Wu Le} and Zhiwei Zhu and Yi Shi and Xiangfan Chen and Yu He and Kornel Ehmann and Ju, {Bing Feng}",

note = "Funding Information: This work was supported by the National Natural Science Foundation of China (Grant Nos. 51425504 and 51575488), Science Fund for Creative Research Groups of National Natural Science Foundation of China Nos. 51521064, Zhejiang Provincial Natural Science Foundation of China No. LZ13E050001, and China Scholarship Council (No. 201406320148)",

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doi = "10.1063/1.4965880",

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AU - Zhu, Wu Le

AU - Zhu, Zhiwei

AU - Shi, Yi

AU - Chen, Xiangfan

AU - He, Yu

AU - Ehmann, Kornel

AU - Ju, Bing Feng

N1 - Funding Information: This work was supported by the National Natural Science Foundation of China (Grant Nos. 51425504 and 51575488), Science Fund for Creative Research Groups of National Natural Science Foundation of China Nos. 51521064, Zhejiang Provincial Natural Science Foundation of China No. LZ13E050001, and China Scholarship Council (No. 201406320148)

PY - 2016/10/1

Y1 - 2016/10/1

N2 - This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.

AB - This article presents a novel two-degrees-of-freedom (2-DoF) piezo-actuated parallel-kinematic micro/nano-positioning stage with multi-level amplification. The mirror symmetric stage consists of four leverage mechanisms, two Scott-Russell mechanisms, and a Z-shaped flexure hinge (ZFH) mechanism. Taking advantage of the ZFH mechanism, 2-DoF motions with final-level flexural amplification and decoupled motion guidance are achieved. Analytical models of the stage are developed and validated through finite element analysis to characterize its working performance. Practical testing of a prototype stage is conducted to demonstrate the design process and to quantify its response characteristics. Due to the utilized multi-level amplification, a practical amplification ratio of 13.0 is realized by the prototype. The decoupled output motion guidance feature of the stage makes it amenable for implementation in raster scanning type of measurements.

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