A novel self-aligned and maskless process for formation of highly uniform arrays of nanoholes and nanopillars

Wei Wu, Dibyendu Dey, Omer G. Memis, Alex Katsnelson, Hooman Mohseni*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

Fabrication of a large area of periodic structures with deep sub-wavelength features is required in many applications such as solar cells, photonic crystals, and artificial kidneys. We present a low-cost and high-throughput process for realization of 2D arrays of deep sub-wavelength features using a self-assembled monolayer of hexagonally close packed (HCP) silica and polystyrene microspheres. This method utilizes the microspheres as super-lenses to fabricate nanohole and pillar arrays over large areas on conventional positive and negative photoresist, and with a high aspect ratio. The period and diameter of the holes and pillars formed with this technique can be controlled precisely and independently. We demonstrate that the method can produce HCP arrays of hole of sub-250 nm size using a conventional photolithography system with a broadband UV source centered at 400 nm. We also present our 3D FDTD modeling, which shows a good agreement with the experimental results.

Original languageEnglish (US)
Pages (from-to)123-127
Number of pages5
JournalNanoscale Research Letters
Volume3
Issue number3
DOIs
StatePublished - Mar 2008

Keywords

  • Lithography
  • Microspheres
  • Nanoholes
  • Nanopillars

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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