A portable, benchtop photolithography system based on a solid-state light source

Mark D. Huntington, Teri W Odom*

*Corresponding author for this work

Research output: Contribution to journalArticle

32 Scopus citations

Abstract

A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

Original languageEnglish (US)
Pages (from-to)3144-3147
Number of pages4
JournalSmall
Volume7
Issue number22
DOIs
StatePublished - Nov 18 2011

Keywords

  • microfabrication
  • microfluidics
  • nanofabrication
  • photolithography
  • soft lithography

ASJC Scopus subject areas

  • Biomaterials
  • Engineering (miscellaneous)
  • Biotechnology
  • Medicine(all)

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