A portable, benchtop photolithography system based on a solid-state light source

Mark D. Huntington; Teri W Odom

doi:10.1002/smll.201101209

A portable, benchtop photolithography system based on a solid-state light source

Mark D. Huntington, Teri W Odom^*

^*Corresponding author for this work

Chemistry

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

Original language	English (US)
Pages (from-to)	3144-3147
Number of pages	4
Journal	Small
Volume	7
Issue number	22
DOIs	https://doi.org/10.1002/smll.201101209
State	Published - Nov 18 2011

Keywords

microfabrication
microfluidics
nanofabrication
photolithography
soft lithography

ASJC Scopus subject areas

Biomaterials
Engineering (miscellaneous)
Biotechnology
Medicine(all)

Access to Document

10.1002/smll.201101209

Cite this

@article{3eafcdb68bc14ede884297bd5da1b56c,

title = "A portable, benchtop photolithography system based on a solid-state light source",

abstract = "A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.",

keywords = "microfabrication, microfluidics, nanofabrication, photolithography, soft lithography",

author = "Huntington, {Mark D.} and Odom, {Teri W}",

year = "2011",

month = nov,

day = "18",

doi = "10.1002/smll.201101209",

language = "English (US)",

volume = "7",

pages = "3144--3147",

journal = "Small",

issn = "1613-6810",

publisher = "Wiley-VCH Verlag",

number = "22",

}

TY - JOUR

T1 - A portable, benchtop photolithography system based on a solid-state light source

AU - Huntington, Mark D.

AU - Odom, Teri W

PY - 2011/11/18

Y1 - 2011/11/18

N2 - A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

AB - A portable and compact photolithography system based on a solid-state light source of UV light-emitting diodes (LEDs) is described. Solid-state photolithography can achieve high-quality patterns over a wide range of length scales at a fraction of the cost of contact mask aligners. 2D nanoscale and 1D microscale patterns can easily be created.

KW - microfabrication

KW - microfluidics

KW - nanofabrication

KW - photolithography

KW - soft lithography

UR - http://www.scopus.com/inward/record.url?scp=81255191887&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=81255191887&partnerID=8YFLogxK

U2 - 10.1002/smll.201101209

DO - 10.1002/smll.201101209

M3 - Article

C2 - 21901830

AN - SCOPUS:81255191887

SN - 1613-6810

VL - 7

SP - 3144

EP - 3147

JO - Small

JF - Small

IS - 22

ER -

A portable, benchtop photolithography system based on a solid-state light source

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this