A printable form of silicon for high performance thin film transistors on plastic substrates

E. Menard; K. J. Lee; D. Y. Khang; R. G. Nuzzo; J. A. Rogers

doi:10.1063/1.1767591

A printable form of silicon for high performance thin film transistors on plastic substrates

E. Menard, K. J. Lee, D. Y. Khang, R. G. Nuzzo, J. A. Rogers^*

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

327 Scopus citations

Abstract

The fabrication of free-standing micro- and nanoscale objects of single crystal silicon from silicon-on-insulator wafers by lithographic patterning of resist was investigated. It is observed that large collection of such objects constitutes a type of material which could be deposited and patterned using dry transfer printing. The effective mobilities of devices built with this material known as microstructured silicon are also demonstrated to be as high as 180 cm ²/V on plastic substrates. The results show that 'top down' microtechnology represents an attractive route to high performance flexible electronic systems.

Original language	English (US)
Pages (from-to)	5398-5400
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	26
DOIs	https://doi.org/10.1063/1.1767591
State	Published - Jun 28 2004

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "A printable form of silicon for high performance thin film transistors on plastic substrates",

abstract = "The fabrication of free-standing micro- and nanoscale objects of single crystal silicon from silicon-on-insulator wafers by lithographic patterning of resist was investigated. It is observed that large collection of such objects constitutes a type of material which could be deposited and patterned using dry transfer printing. The effective mobilities of devices built with this material known as microstructured silicon are also demonstrated to be as high as 180 cm 2/V on plastic substrates. The results show that 'top down' microtechnology represents an attractive route to high performance flexible electronic systems.",

author = "E. Menard and Lee, {K. J.} and Khang, {D. Y.} and Nuzzo, {R. G.} and Rogers, {J. A.}",

note = "Funding Information: We thank M. Kane for useful discussions. The work was partially supported by the Defense Advanced Projects Agency and by the U.S. Department of Energy under Grant No. DEFG02-91-ER45439. D.-Y.K. thanks the Korea Science and Engineering Foundation (KOSEF) for post-doctoral fellowship support. ",

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AU - Menard, E.

AU - Lee, K. J.

AU - Khang, D. Y.

AU - Nuzzo, R. G.

AU - Rogers, J. A.

N1 - Funding Information: We thank M. Kane for useful discussions. The work was partially supported by the Defense Advanced Projects Agency and by the U.S. Department of Energy under Grant No. DEFG02-91-ER45439. D.-Y.K. thanks the Korea Science and Engineering Foundation (KOSEF) for post-doctoral fellowship support.

PY - 2004/6/28

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N2 - The fabrication of free-standing micro- and nanoscale objects of single crystal silicon from silicon-on-insulator wafers by lithographic patterning of resist was investigated. It is observed that large collection of such objects constitutes a type of material which could be deposited and patterned using dry transfer printing. The effective mobilities of devices built with this material known as microstructured silicon are also demonstrated to be as high as 180 cm 2/V on plastic substrates. The results show that 'top down' microtechnology represents an attractive route to high performance flexible electronic systems.

AB - The fabrication of free-standing micro- and nanoscale objects of single crystal silicon from silicon-on-insulator wafers by lithographic patterning of resist was investigated. It is observed that large collection of such objects constitutes a type of material which could be deposited and patterned using dry transfer printing. The effective mobilities of devices built with this material known as microstructured silicon are also demonstrated to be as high as 180 cm 2/V on plastic substrates. The results show that 'top down' microtechnology represents an attractive route to high performance flexible electronic systems.

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A printable form of silicon for high performance thin film transistors on plastic substrates

Abstract

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