A pulser for medium-frequency modulated direct-current reactive sputter deposition of insulators

G. T. Kiehne; M. Z. Lin; G. Wang; W. H. Xiang; H. Cao; J. B. Ketterson

doi:10.1063/1.1150648

A pulser for medium-frequency modulated direct-current reactive sputter deposition of insulators

G. T. Kiehne^*, M. Z. Lin, G. Wang, W. H. Xiang, H. Cao, J. B. Ketterson

^*Corresponding author for this work

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We present the circuit design of a unit for medium-frequency modulated direct-current (dc) reactive sputter deposition of electrical insulators. The unit is connected in series between a commercial dc sputtering power supply and a sputtering cathode (target). It modulates the voltage applied to the sputtering cathode in a pulsed, asymmetric bipolar fashion. The pulsing effectively eliminates the problem of arcing at the target surface. The simple circuit is a low-cost, flexible alternative to commercially available units. To demonstrate its utility, we deposited a film of 5 SiO₂/TiO₂ bilayers, forming a highly reflective dielectric optical mirror with a stop band centered near a wavelength in air of 600 nm.

Original language	English (US)
Pages (from-to)	2560-2562
Number of pages	3
Journal	Review of Scientific Instruments
Volume	71
Issue number	6
DOIs	https://doi.org/10.1063/1.1150648
State	Published - Jun 2000

ASJC Scopus subject areas

Instrumentation

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title = "A pulser for medium-frequency modulated direct-current reactive sputter deposition of insulators",

abstract = "We present the circuit design of a unit for medium-frequency modulated direct-current (dc) reactive sputter deposition of electrical insulators. The unit is connected in series between a commercial dc sputtering power supply and a sputtering cathode (target). It modulates the voltage applied to the sputtering cathode in a pulsed, asymmetric bipolar fashion. The pulsing effectively eliminates the problem of arcing at the target surface. The simple circuit is a low-cost, flexible alternative to commercially available units. To demonstrate its utility, we deposited a film of 5 SiO2/TiO2 bilayers, forming a highly reflective dielectric optical mirror with a stop band centered near a wavelength in air of 600 nm.",

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T1 - A pulser for medium-frequency modulated direct-current reactive sputter deposition of insulators

AU - Kiehne, G. T.

AU - Lin, M. Z.

AU - Wang, G.

AU - Xiang, W. H.

AU - Cao, H.

AU - Ketterson, J. B.

PY - 2000/6

Y1 - 2000/6

N2 - We present the circuit design of a unit for medium-frequency modulated direct-current (dc) reactive sputter deposition of electrical insulators. The unit is connected in series between a commercial dc sputtering power supply and a sputtering cathode (target). It modulates the voltage applied to the sputtering cathode in a pulsed, asymmetric bipolar fashion. The pulsing effectively eliminates the problem of arcing at the target surface. The simple circuit is a low-cost, flexible alternative to commercially available units. To demonstrate its utility, we deposited a film of 5 SiO2/TiO2 bilayers, forming a highly reflective dielectric optical mirror with a stop band centered near a wavelength in air of 600 nm.

AB - We present the circuit design of a unit for medium-frequency modulated direct-current (dc) reactive sputter deposition of electrical insulators. The unit is connected in series between a commercial dc sputtering power supply and a sputtering cathode (target). It modulates the voltage applied to the sputtering cathode in a pulsed, asymmetric bipolar fashion. The pulsing effectively eliminates the problem of arcing at the target surface. The simple circuit is a low-cost, flexible alternative to commercially available units. To demonstrate its utility, we deposited a film of 5 SiO2/TiO2 bilayers, forming a highly reflective dielectric optical mirror with a stop band centered near a wavelength in air of 600 nm.

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A pulser for medium-frequency modulated direct-current reactive sputter deposition of insulators

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