A structure study of the electroless deposition of Au on Si(1 1 1):H

Electroless deposition of gold in monolayer amounts on hydrogen terminated Si(1 1 1) was studied by a variety of structure sensitive techniques. Rutherford back scattering data revealed a linear relationship between the Au coverage and the concentration of the Au solution used for deposition. Atomic force microscopy and surface X-ray diffraction studies indicated cluster formation, with the Au(1 1 1) face epitaxially aligned to the Si(1 1 1):H substrate. However, X-ray standing wave experiments at coverage below one monolayer suggested the formation of a gold layer. Both clusters and isolated Au atoms appear to be present at all coverages, which is explained by the formation of type of Au 'wetting layer', in addition to cluster formation which increases as the coverage increases.