Engineering
Actuators
100%
Testing
50%
Microelectromechanical System
50%
Design
33%
Sensor
33%
Optimization
16%
One Dimensional
16%
Nanowire
16%
Dimensional Structure
16%
Thin Films
16%
Nanoscale
16%
Beam Angle
16%
Capacitive
16%
Design Criterion
16%
Polysilicon
16%
Experiments
16%
Mechanical Properties
16%
Prediction
16%
Demonstrates
16%
Performance
16%
Measurer
16%
Newton (Force)
16%
INIS
actuators
100%
design
50%
testing
50%
beams
33%
microscopy
16%
mechanical properties
16%
thin films
16%
nanostructures
16%
devices
16%
comparative evaluations
16%
performance
16%
prediction
16%
optimization
16%
one-dimensional calculations
16%
sensors
16%
nanowires
16%
finite element method
16%
carbon nanotubes
16%
materials testing
16%
Physics
Actuators
100%
Responses
33%
Thin Films
16%
Microscopy
16%
Nanoscale
16%
Strength of Materials
16%
Performance
16%
Optimization
16%
Nanowires
16%
Displacement
16%
Material Science
Beam
33%
Finite Element Methods
33%
Characterization
16%
Thin Films
16%
Material Testing
16%
Mechanical Property
16%
Devices
16%
Materials Structure
16%