Abstract
We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 442-445 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| State | Published - Jul 19 2004 |
| Event | 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: Jan 25 2004 → Jan 29 2004 |
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ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Wang, X., Vincent, L., Minfeng, Y., Huang, Y., & Liu, C. (2004). A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 442-445.