A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures

Xuefeng Wang; Loren Vincent; Yu Minfeng; Yonggang Huang; Chang Liu

A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures

Xuefeng Wang^*, Loren Vincent, Yu Minfeng, Yonggang Huang, Chang Liu

^*Corresponding author for this work

Civil and Environmental Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

Original language	English (US)
Pages (from-to)	442-445
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
State	Published - Jul 19 2004
Event	17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands Duration: Jan 25 2004 → Jan 29 2004

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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title = "A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures",

abstract = "We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.",

author = "Xuefeng Wang and Loren Vincent and Yu Minfeng and Yonggang Huang and Chang Liu",

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journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

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note = "17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest ; Conference date: 25-01-2004 Through 29-01-2004",

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A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures. / Wang, Xuefeng; Vincent, Loren; Minfeng, Yu; Huang, Yonggang; Liu, Chang.

In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 19.07.2004, p. 442-445.

Research output: Contribution to journal › Conference article › peer-review

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T1 - A thermally actuated three-probe nanomanipulator for efficient handling of individual nanostructures

AU - Wang, Xuefeng

AU - Vincent, Loren

AU - Minfeng, Yu

AU - Huang, Yonggang

AU - Liu, Chang

PY - 2004/7/19

Y1 - 2004/7/19

N2 - We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

AB - We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

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