A three-axis translation stage using opposing wedges with error compensation

Gyungho Khim*, Seung Kook Ro, Jong Kweon Park, Kornel Ehmann

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

We describe the development of a three-axis translation stage using wedges and its motion error compensation. The threeaxis stage uses three wedges and is capable of translation in the vertical and longitudinal directions by controlling the horizontal separation of two opposing wedges. An independent linear translation stage is used to achieve displacement along the third axis. Compensation for straightness and positioning errors is achieved using the combined motion of the two opposing wedges and the motion of an independent linear stage. The straightness error in the vertical and horizontal directions through the longitudinal axis was 0.83 μm and 1.65 μm, respectively, before compensation and 0.22 μm and 0.29 μm with error compensation. The positioning error through the longitudinal axis was reduced from 8.96 μm to 0.85 μm.

Original languageEnglish (US)
Pages (from-to)401-406
Number of pages6
JournalInternational Journal of Precision Engineering and Manufacturing
Volume13
Issue number3
DOIs
StatePublished - Mar 1 2012

Keywords

  • Air bearings
  • Compensation
  • Positioning error
  • Straightness error
  • Wedge stage

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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