Abstract
We describe the development of a three-axis translation stage using wedges and its motion error compensation. The threeaxis stage uses three wedges and is capable of translation in the vertical and longitudinal directions by controlling the horizontal separation of two opposing wedges. An independent linear translation stage is used to achieve displacement along the third axis. Compensation for straightness and positioning errors is achieved using the combined motion of the two opposing wedges and the motion of an independent linear stage. The straightness error in the vertical and horizontal directions through the longitudinal axis was 0.83 μm and 1.65 μm, respectively, before compensation and 0.22 μm and 0.29 μm with error compensation. The positioning error through the longitudinal axis was reduced from 8.96 μm to 0.85 μm.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 401-406 |
| Number of pages | 6 |
| Journal | International Journal of Precision Engineering and Manufacturing |
| Volume | 13 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 2012 |
Funding
This research was supported by the Industrial Source Technology Development Programs funded by the Ministry of the Knowledge Economy (MKE), Korea.
Keywords
- Air bearings
- Compensation
- Positioning error
- Straightness error
- Wedge stage
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering