Aberration compensation in aplanatic solid immersion lens microscopy

Yang Lu, Thomas Bifano, Selim Ünlü, Bennett Goldberg

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

Original languageEnglish (US)
Pages (from-to)28189-28197
Number of pages9
JournalOptics Express
Issue number23
StatePublished - Nov 18 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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