Aberration compensation in aplanatic solid immersion lens microscopy

Yang Lu, Thomas Bifano, Selim Ünlü, Bennett Goldberg

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to recover near-ideal imaging quality by compensating aberrations using a MEMS deformable mirror is described and demonstrated.

Original languageEnglish (US)
Pages (from-to)28189-28197
Number of pages9
JournalOptics Express
Volume21
Issue number23
DOIs
StatePublished - Nov 18 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Aberration compensation in aplanatic solid immersion lens microscopy'. Together they form a unique fingerprint.

Cite this