Abstract
In this abstract, the design, operation, and use of a single-grid, electron impact, ultra-high vacuum (uhv) compatible, low-to-medium energy ion source capable of operating with medium vapor-pressure source materials such as In are described. The present design was based on a previously reported source used for higher vapor pressure metals such as Zn and As. A crucial feature of the present design was the use of a single crucible which served as both in effusion cell and discharge chamber, and which helped maintain the temperature of all source surfaces high enough to avoid
Original language | English (US) |
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Pages (from-to) | 1017-1018 |
Number of pages | 2 |
Journal | Vacuum |
Volume | 36 |
Issue number | 11-12 |
DOIs | |
State | Published - 1986 |
Event | Low Energy Ion Beams, Proc of the Fourth Conf - Brighton, Engl Duration: Apr 7 1986 → Apr 10 1986 |
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films