Acoustic waveguide properties of a thin film of nanoporous silica on silicon

John A. Rogers, Carlye Case

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

The acoustic waveguiding in nanoporous silica thin films deposited on silicon substrate was studied. The waveguide exhibited large dispersion in velocities due to large mismatch between the film acoustic properties and substrate, leading to unusual acoustic behavior. Acoustic waveguides with low group acoustic velocities and large range of wavelength can be fabricated with the integration of the low density, low intrinsic velocity films with high velocity substrates.

Original languageEnglish (US)
Pages (from-to)865-867
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number6
DOIs
StatePublished - Aug 9 1999

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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