The acoustic waveguiding in nanoporous silica thin films deposited on silicon substrate was studied. The waveguide exhibited large dispersion in velocities due to large mismatch between the film acoustic properties and substrate, leading to unusual acoustic behavior. Acoustic waveguides with low group acoustic velocities and large range of wavelength can be fabricated with the integration of the low density, low intrinsic velocity films with high velocity substrates.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Aug 9 1999|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)