Active polymeric composite membranes for localized actuation and sensing in microtransfer printing

Numair Ahmed, Canan Dagdeviren, John A. Rogers, Placid M. Ferreira

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

Soft locally active structures are becoming increasingly important in a number of applications, from microfluidic systems to soft robotics. In this paper, we develop an active polymeric composite membrane for use as an active stamp in the microtransfer printing process. The membrane is a composite of multiple layers: 1) a soft polydimethylsiloxane layer for transfer printing; 2) a lead zirconate titanate (PbZr0.52Ti0.48O3) layer for actuation; 3) metal layers for strain sensing and interconnects; and 4) patterned photopolymer (SU-8) layers for selectively tuning the compliance in the membrane and for handling. A novel and scalable fabrication approach that uses photolithography and microtransfer printing is developed for heterogeneously integrating the different materials into a functional structure. Approaches to designing and characterizing these active membranes are also discussed. Finally, the use of such membranes as stamps in the microtransfer printing process is demonstrated. By distributing actuation closer to critical regions of the tool, adaptability to local conditions for increased robustness and greater process flexibility is achieved. [2014-0211]

Original languageEnglish (US)
Article number6985524
Pages (from-to)1016-1028
Number of pages13
JournalJournal of Microelectromechanical Systems
Volume24
Issue number4
DOIs
StatePublished - Aug 1 2015

Keywords

  • Microactuators
  • active composite.
  • microassembly
  • microelectromechanical devices
  • micromachining
  • transfer printing

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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