Adaptive optics compensation of aberrations introduced by sample thickness error in aSIL confocal scanning microscopy

Y. Lu*, T. G. Bifano, M. S. Ünlü, B. B. Goldberg

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on aberration compensation in an aplanatic solid immersion lens microscope used for high-resolution backside inspection of silicon integrated circuits. The imaging quality of aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the silicon integrated circuit samples have thicknesses that are more than a few micrometers thicker or thinner than ideal. We describe and demonstrate a technique to recover near-ideal imaging quality by compensating those aberrations using a MEMS deformable mirror. The mirror, located in an optical plane conjugate to the microscope objective, is shaped in a way that counteracts spherical aberration errors associated with non-ideal sample thickness.

Original languageEnglish (US)
Title of host publicationISTFA 2013 - Conference Proceedings from the 39th International Symposium for Testing and Failure Analysis
PublisherASM International
Pages417-419
Number of pages3
ISBN (Print)1627080228, 9781627080224
StatePublished - Jan 1 2013
Event39th International Symposium for Testing and Failure Analysis, ISTFA 2013 - San Jose, CA, United States
Duration: Nov 3 2013Nov 7 2013

Publication series

NameConference Proceedings from the International Symposium for Testing and Failure Analysis

Other

Other39th International Symposium for Testing and Failure Analysis, ISTFA 2013
CountryUnited States
CitySan Jose, CA
Period11/3/1311/7/13

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Safety, Risk, Reliability and Quality
  • Electrical and Electronic Engineering

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