Adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) on Si(100) 2×1 and porous silicon surfaces

L. A. Okada, A. C. Dillon, A. W. Ott, S. M. George*

*Corresponding author for this work

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

The adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) (DSB) was studied on Si(100) 2×1 and porous silicon surfaces. Temperature programmed desorption (TPD) studies revealed that H2 and ethylene (C2H4) were the major reaction products from Si(100) 2×1. These reaction products were also confirmed using laser induced thermal desorption (LITD) techniques. In addition, Auger analysis showed only ∼0.2-1.7% carbon deposition after saturation DSB exposures on Si(100) 2×1. This surprisingly low carbon incorporation may be explained by the efficient C2H4 desorption pathway. Fourier transform infrared (FTIR) spectra obtained after DSB adsorption on porous silicon surfaces at 200 K showed the presence of mostly SiH3 vibrational modes and the absence of CH3 vibrational features. These spectral characteristics suggest initial dissociative chemisorption of DSB through Si-C bond breakage. The FTIR spectra versus thermal annealing were consistent with a progressive SiH3→SiH2→SiH decomposition and a di-σ "ethylene-like" intermediate that produces the C2H4 desorption product. LITD studies also tested for the presence of SiH3 surface species on Si(100) 2×1 following DSB exposures and observed SiH3 LITD signals. Comparisons with LITD results following disilane saturation exposures suggest different bond breaking pathways for DSB and disilane adsorption on Si(100) 2×1.

Original languageEnglish (US)
Pages (from-to)353-366
Number of pages14
JournalSurface Science
Volume418
Issue number2
DOIs
StatePublished - Dec 5 1998

Keywords

  • Infrared absorption spectroscopy
  • Laser induced thermal desorption (LITD)
  • Silane; silicon
  • Single-crystal interface
  • Surface chemical reaction
  • Thermal desorption spectroscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Adsorption and decomposition of 1,4-disilabutane (SiH<sub>3</sub>CH<sub>2</sub>CH<sub>2</sub>SiH<sub>3</sub>) on Si(100) 2×1 and porous silicon surfaces'. Together they form a unique fingerprint.

  • Cite this