Adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) on Si(100) 2×1 and porous silicon surfaces

L. A. Okada, A. C. Dillon, A. W. Ott, S. M. George*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

The adsorption and decomposition of 1,4-disilabutane (SiH3CH2CH2SiH3) (DSB) was studied on Si(100) 2×1 and porous silicon surfaces. Temperature programmed desorption (TPD) studies revealed that H2 and ethylene (C2H4) were the major reaction products from Si(100) 2×1. These reaction products were also confirmed using laser induced thermal desorption (LITD) techniques. In addition, Auger analysis showed only ∼0.2-1.7% carbon deposition after saturation DSB exposures on Si(100) 2×1. This surprisingly low carbon incorporation may be explained by the efficient C2H4 desorption pathway. Fourier transform infrared (FTIR) spectra obtained after DSB adsorption on porous silicon surfaces at 200 K showed the presence of mostly SiH3 vibrational modes and the absence of CH3 vibrational features. These spectral characteristics suggest initial dissociative chemisorption of DSB through Si-C bond breakage. The FTIR spectra versus thermal annealing were consistent with a progressive SiH3→SiH2→SiH decomposition and a di-σ "ethylene-like" intermediate that produces the C2H4 desorption product. LITD studies also tested for the presence of SiH3 surface species on Si(100) 2×1 following DSB exposures and observed SiH3 LITD signals. Comparisons with LITD results following disilane saturation exposures suggest different bond breaking pathways for DSB and disilane adsorption on Si(100) 2×1.

Original languageEnglish (US)
Pages (from-to)353-366
Number of pages14
JournalSurface Science
Volume418
Issue number2
DOIs
StatePublished - Dec 5 1998

Funding

This work was supported by the Office of Naval Research and the Air Force Office of Scientific Research. The authors would like to thank Dr. Daniel Sullivan of the Material Analysis Group at Philips Laboratories, Sunnyvale, CA for helpful discussions. The authors would also like to thank Dr. David Roberts of Schumacher, Inc., Carlsbad, CA for the DSB precursor.

Keywords

  • Infrared absorption spectroscopy
  • Laser induced thermal desorption (LITD)
  • Silane; silicon
  • Single-crystal interface
  • Surface chemical reaction
  • Thermal desorption spectroscopy

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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