Adsorption and desorption kinetics of In on Si(100)

J. Knall*, S. A. Barnett, J. E. Sundgren, J. E. Greene

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

The structure and surface morphology of In overlayers on Si(100) surfaces were investigated as a function of substrate temperature and surface coverage using low-energy and reflection high-energy electron diffraction as well as Auger electron spectroscopy. Desorption kinetics of adsorbed In was studied with modulated-beam desorption and temperature-programmed desorption spectroscopies. Indium was found to grow on Si(100) according to a Stranski-Krastanov mechanism with the initial formation of several two-dimensional phases preceding the nucleation and growth of three-dimensional In islands. Binding energies and frequency factors were extracted from the desorption measurements using a model based on first-order desorption from several interdependent surface phases. First-order and zeroth-order kinetics were observed for the total desorbing flux from coexisting surface phases.

Original languageEnglish (US)
Pages (from-to)314-334
Number of pages21
JournalSurface Science
Volume209
Issue number3
DOIs
StatePublished - Mar 1 1989

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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