Advanced microelectromechanical systems-based nanomechanical testing

Beyond stress and strain measurements

Sanjit Bhowmick, Horacio Dante Espinosa, Katherine Jungjohann, Thomas Pardoen, Olivier Pierron

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The field of in situ nanomechanics is greatly benefiting from microelectromechanical systems (MEMS) technology and integrated microscale testing machines that can measure a wide range of mechanical properties at nanometer scales, while characterizing the damage or microstructure evolution in electron microscopes. This article focuses on the latest advances in MEMS-based nanomechanical testing techniques that go beyond stress and strain measurements under typical monotonic loadings. Specifically, recent advances in MEMS testing machines now enable probing key mechanical properties of nanomaterials related to fracture, fatigue, and wear. Tensile properties can be measured without instabilities or at high strain rates, and signature parameters such as activation volume can be obtained. Opportunities for environmental in situ nanomechanics enabled by MEMS technology are also discussed.

Original languageEnglish (US)
Pages (from-to)487-493
Number of pages7
JournalMRS Bulletin
Volume44
Issue number6
DOIs
StatePublished - Jun 1 2019

Fingerprint

stress measurement
strain measurement
Strain measurement
Stress measurement
microelectromechanical systems
MEMS
Nanomechanics
Testing
test equipment
mechanical properties
Mechanical properties
tensile properties
Tensile properties
Nanostructured materials
microbalances
strain rate
Strain rate
Electron microscopes
electron microscopes
Chemical activation

Keywords

  • fatigue
  • fracture
  • microelectro-mechanical (MEMS)
  • strength
  • transmission electron microscopy (TEM)
  • tribology

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

Bhowmick, Sanjit ; Espinosa, Horacio Dante ; Jungjohann, Katherine ; Pardoen, Thomas ; Pierron, Olivier. / Advanced microelectromechanical systems-based nanomechanical testing : Beyond stress and strain measurements. In: MRS Bulletin. 2019 ; Vol. 44, No. 6. pp. 487-493.
@article{86ee6616ec014982bd25ad12fb9a384e,
title = "Advanced microelectromechanical systems-based nanomechanical testing: Beyond stress and strain measurements",
abstract = "The field of in situ nanomechanics is greatly benefiting from microelectromechanical systems (MEMS) technology and integrated microscale testing machines that can measure a wide range of mechanical properties at nanometer scales, while characterizing the damage or microstructure evolution in electron microscopes. This article focuses on the latest advances in MEMS-based nanomechanical testing techniques that go beyond stress and strain measurements under typical monotonic loadings. Specifically, recent advances in MEMS testing machines now enable probing key mechanical properties of nanomaterials related to fracture, fatigue, and wear. Tensile properties can be measured without instabilities or at high strain rates, and signature parameters such as activation volume can be obtained. Opportunities for environmental in situ nanomechanics enabled by MEMS technology are also discussed.",
keywords = "fatigue, fracture, microelectro-mechanical (MEMS), strength, transmission electron microscopy (TEM), tribology",
author = "Sanjit Bhowmick and Espinosa, {Horacio Dante} and Katherine Jungjohann and Thomas Pardoen and Olivier Pierron",
year = "2019",
month = "6",
day = "1",
doi = "10.1557/mrs.2019.123",
language = "English (US)",
volume = "44",
pages = "487--493",
journal = "MRS Bulletin",
issn = "0883-7694",
publisher = "Materials Research Society",
number = "6",

}

Advanced microelectromechanical systems-based nanomechanical testing : Beyond stress and strain measurements. / Bhowmick, Sanjit; Espinosa, Horacio Dante; Jungjohann, Katherine; Pardoen, Thomas; Pierron, Olivier.

In: MRS Bulletin, Vol. 44, No. 6, 01.06.2019, p. 487-493.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Advanced microelectromechanical systems-based nanomechanical testing

T2 - Beyond stress and strain measurements

AU - Bhowmick, Sanjit

AU - Espinosa, Horacio Dante

AU - Jungjohann, Katherine

AU - Pardoen, Thomas

AU - Pierron, Olivier

PY - 2019/6/1

Y1 - 2019/6/1

N2 - The field of in situ nanomechanics is greatly benefiting from microelectromechanical systems (MEMS) technology and integrated microscale testing machines that can measure a wide range of mechanical properties at nanometer scales, while characterizing the damage or microstructure evolution in electron microscopes. This article focuses on the latest advances in MEMS-based nanomechanical testing techniques that go beyond stress and strain measurements under typical monotonic loadings. Specifically, recent advances in MEMS testing machines now enable probing key mechanical properties of nanomaterials related to fracture, fatigue, and wear. Tensile properties can be measured without instabilities or at high strain rates, and signature parameters such as activation volume can be obtained. Opportunities for environmental in situ nanomechanics enabled by MEMS technology are also discussed.

AB - The field of in situ nanomechanics is greatly benefiting from microelectromechanical systems (MEMS) technology and integrated microscale testing machines that can measure a wide range of mechanical properties at nanometer scales, while characterizing the damage or microstructure evolution in electron microscopes. This article focuses on the latest advances in MEMS-based nanomechanical testing techniques that go beyond stress and strain measurements under typical monotonic loadings. Specifically, recent advances in MEMS testing machines now enable probing key mechanical properties of nanomaterials related to fracture, fatigue, and wear. Tensile properties can be measured without instabilities or at high strain rates, and signature parameters such as activation volume can be obtained. Opportunities for environmental in situ nanomechanics enabled by MEMS technology are also discussed.

KW - fatigue

KW - fracture

KW - microelectro-mechanical (MEMS)

KW - strength

KW - transmission electron microscopy (TEM)

KW - tribology

UR - http://www.scopus.com/inward/record.url?scp=85067069168&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85067069168&partnerID=8YFLogxK

U2 - 10.1557/mrs.2019.123

DO - 10.1557/mrs.2019.123

M3 - Article

VL - 44

SP - 487

EP - 493

JO - MRS Bulletin

JF - MRS Bulletin

SN - 0883-7694

IS - 6

ER -