Aerosol-assisted chemical vapor deposition of lubricating MoS2 films. Ferrous substrates and titanium film doping

Matthew N. McCain, Bo He, Javad Sanati, Q. Jane Wang, Tobin J. Marks

Research output: Contribution to journalArticlepeer-review

30 Scopus citations


MoS2 thin films have been deposited onto 52100 steel substrates by aerosol-assisted chemical vapor deposition using the metal-organic precursor tetrakis(diethyl-dithiocarbamato)molybdenum(IV) (1). Analysis of the films indicates growth of an initial, highly crystalline FeS layer exhibiting preferred orientation parallel to the substrate, followed by growth of MoS 2 nanoparticles. Friction coefficients for MoS2-coated steel specimens reach 0.10 when tested at 100°C in air. Tetrakis(tert- butylthiolato)titanium(IV) (2), dissolved with complex 1 in THF solutions, yields nanoparticle films of variable TiO2 content as a result of solvent decomposition on MoS2 and subsequent in situ reaction with the titanium precursor.

Original languageEnglish (US)
Pages (from-to)5438-5443
Number of pages6
JournalChemistry of Materials
Issue number16
StatePublished - Aug 26 2008

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)
  • Materials Chemistry


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