Aligned arrays of single walled carbon nanotubes for transparent electronics

Frank Du, John A. Rogers

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

Single walled carbon nanotubes have garnered substantial interest in the electronic materials research community due to their unparalleled intrinsic electrical properties. In addition, their mechanical robustness and thin geometries make SWNTs ideal candidates for transparent electronics. Aligned arrays of SWNTs grown via chemical vapor deposition (CVD) on quartz enable device uniformity and wafer scale integration with existing commercial semiconductor processing methods. A crucial roadblock in incorporation of SWNTs in commercial electronics has been the co-existence of metallic and semiconducting SWNTs. Demanding device metrics in high performance and complex integrated electrical devices, sensors, and other applications dictate the necessity of pristine, purely semiconducting arrays of SWNTs. By exploiting a novel process in nanoscale flow of thin film organic coatings, we have demonstrated a method to purify as-grown aligned arrays to produce such as result. Comparison with single nanotube statistics, characterization using a novel thermal scanning probe microscopy technique, as well as corroboration with thermal modeling validated the result. Thin film field effect transistors exhibiting mobilities exceeding ∼1000cm2/Vs and on/off ratios exceeding 10,000 were fabricated using the purified semiconducting SWNTs. This manuscript reviews some of these results, which represent the first successful demonstration of purification of aligned arrays of SWNTs, in a robust and scalable scheme that allows integration of aligned arrays into complex, high performance electrical devices. We separately also describe new results on the advanced development of soft lithography techniques with the ability to transfer print aligned arrays of SWNTs onto transparent substrates after synthesis and processing, thereby completing a direct pathway to achieve complex, high performance, and highly integrated transparent SWNTs electronics, sensors, or other devices.

Original languageEnglish (US)
Article number87251S
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume8725
DOIs
StatePublished - Aug 12 2013
Event2013 Micro- and Nanotechnology Sensors, Systems, and Applications V Conference - Baltimore, MD, United States
Duration: Apr 29 2013May 3 2013

Fingerprint

Single-walled Carbon Nanotubes
Single-walled carbon nanotubes (SWCN)
Electronic equipment
carbon nanotubes
Electronics
WSI circuits
electronics
Scanning probe microscopy
Organic coatings
Quartz
High Performance
Sensors
Thin film transistors
Processing
Field effect transistors
Lithography
Nanotubes
Purification
Thin Films
Chemical vapor deposition

Keywords

  • Aligned arrays
  • CVD
  • Purification
  • Quartz
  • Single-walled carbon nanotubes
  • Transparent electronics

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

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abstract = "Single walled carbon nanotubes have garnered substantial interest in the electronic materials research community due to their unparalleled intrinsic electrical properties. In addition, their mechanical robustness and thin geometries make SWNTs ideal candidates for transparent electronics. Aligned arrays of SWNTs grown via chemical vapor deposition (CVD) on quartz enable device uniformity and wafer scale integration with existing commercial semiconductor processing methods. A crucial roadblock in incorporation of SWNTs in commercial electronics has been the co-existence of metallic and semiconducting SWNTs. Demanding device metrics in high performance and complex integrated electrical devices, sensors, and other applications dictate the necessity of pristine, purely semiconducting arrays of SWNTs. By exploiting a novel process in nanoscale flow of thin film organic coatings, we have demonstrated a method to purify as-grown aligned arrays to produce such as result. Comparison with single nanotube statistics, characterization using a novel thermal scanning probe microscopy technique, as well as corroboration with thermal modeling validated the result. Thin film field effect transistors exhibiting mobilities exceeding ∼1000cm2/Vs and on/off ratios exceeding 10,000 were fabricated using the purified semiconducting SWNTs. This manuscript reviews some of these results, which represent the first successful demonstration of purification of aligned arrays of SWNTs, in a robust and scalable scheme that allows integration of aligned arrays into complex, high performance electrical devices. We separately also describe new results on the advanced development of soft lithography techniques with the ability to transfer print aligned arrays of SWNTs onto transparent substrates after synthesis and processing, thereby completing a direct pathway to achieve complex, high performance, and highly integrated transparent SWNTs electronics, sensors, or other devices.",
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Aligned arrays of single walled carbon nanotubes for transparent electronics. / Du, Frank; Rogers, John A.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 8725, 87251S, 12.08.2013.

Research output: Contribution to journalConference article

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