TY - JOUR
T1 - AlxGa1?xN-based deep-ultraviolet 320×256 focal plane array
AU - Cicek, Erdem
AU - Vashaei, Zahra
AU - Huang, Edward Kwei Wei
AU - McClintock, Ryan
AU - Razeghi, Manijeh
PY - 2012/3/1
Y1 - 2012/3/1
N2 - We report the synthesis, fabrication, and testing of a 320 × 256 focal plane array (FPA) of back-illuminated, solarblind, p-i-n, Al xGa1?xN-based detectors, fully realized within our research laboratory. We implemented a pulse atomic layer deposition technique for the metalorganic chemical vapor deposition growth of thick, high-quality, crack-free, high Al composition AlxGa1?xN layers. The FPA is hybridized to a matching ISC 9809 readout integrated circuit and operated in a SE-IR camera system. Solar-blind operation is observed throughout the array with peak detection occurring at wavelengths of 256 nm and lower, and falling off three orders of magnitude by ∼285 nm. By developing an opaque masking technology, the visible response of the ROIC is significantly reduced; thus the need for external filtering to achieve solar- and visible-blind operation is eliminated. This allows the FPA to achieve high external quantum efficiency (EQE); at 254 nm, average pixels showed unbiased peak responsivity of 75 mA?W, which corresponds to an EQE of ∼37%. Finally, the uniformity of the FPA and imaging properties are investigated.
AB - We report the synthesis, fabrication, and testing of a 320 × 256 focal plane array (FPA) of back-illuminated, solarblind, p-i-n, Al xGa1?xN-based detectors, fully realized within our research laboratory. We implemented a pulse atomic layer deposition technique for the metalorganic chemical vapor deposition growth of thick, high-quality, crack-free, high Al composition AlxGa1?xN layers. The FPA is hybridized to a matching ISC 9809 readout integrated circuit and operated in a SE-IR camera system. Solar-blind operation is observed throughout the array with peak detection occurring at wavelengths of 256 nm and lower, and falling off three orders of magnitude by ∼285 nm. By developing an opaque masking technology, the visible response of the ROIC is significantly reduced; thus the need for external filtering to achieve solar- and visible-blind operation is eliminated. This allows the FPA to achieve high external quantum efficiency (EQE); at 254 nm, average pixels showed unbiased peak responsivity of 75 mA?W, which corresponds to an EQE of ∼37%. Finally, the uniformity of the FPA and imaging properties are investigated.
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U2 - 10.1364/OL.37.000896
DO - 10.1364/OL.37.000896
M3 - Article
C2 - 22378430
AN - SCOPUS:84857869171
SN - 0146-9592
VL - 37
SP - 896
EP - 898
JO - Optics Letters
JF - Optics Letters
IS - 5
ER -